DS/ISO 14644-12:2018

Renrum og tilknyttede kontrollerede områder – Del 12: Specifikation af overvågning af luftrenhed ved hjælp af nanopartikelkoncentration


Status:
Gældende
Type:
Standard
Sprog:
Engelsk
Kategori:
Pris fra:
kr. 423,00

Beskrivelse

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 – For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 – As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 – Health and safety considerations are excluded from this document.

Antal sider: 20

Udgivet: 2018-09-05

Godkendelsesdato: 2018-09-03

Internationale relationer : ISO 14644-12:2018 IDT

ICS: 13.040.35 - Renrum og tilsvarende overvågede miljøer

Varenummer: M310547


Udvalg og komiteer

Komite

  • ISO/TC 209
  • ISO/TC 209/WG 10

Dansk udvalg

DS/S-438