DS/ISO 23216:2021

Kulstofbaserede film – Bestemmelse af optiske egenskaber for amorfe kulstoffilm ved spektroskopisk ellipsometri


Status:
Gældende
Type:
Standard
Sprog:
Engelsk
Pris fra:
kr. 341,00

Beskrivelse

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Antal sider: 16

Udgivet: 2021-05-12

Godkendelsesdato: 2021-05-10

Internationale relationer : ISO 23216:2021 IDT

ICS: 25.220.99 - Andre behandlinger og belægninger

Varenummer: M348277


Udvalg og komiteer

Komite

  • ISO/TC 107
  • ISO/TC 107/JWG 4

Dansk udvalg

DS/S-305