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DS/CEN ISO/TS 80004-8:2015

Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes


Status:
Current
Type:
Standard
Language:
English
Price from:
€ 85.95

Scope

This Technical Specification gives terms and definitions related to nanomanufacturing processes in the
field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation
covering the different aspects of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing. Many of the listed processes
are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes may
result in material features at the nanoscale or, alternatively, larger scales.
There are many other terms that name tools, components, materials, systems control methods or
metrology methods associated with nanomanufacturing that are beyond the scope of this document.

Number of pages: 42

Published: 2015-06-25

Date of approval: 2015-06-01

International relationships : CEN ISO/TS 80004-8:2015 IDT ISO/TS 80004-8:2013 IDT

Item number: M291697


Committees

Committee

  • CEN/TC 352
  • ISO/TC 229
  • ISO/TC 229/JWG 1

Danish committee

DS/S-418