DS/IEC/TR 63258:2021

Nanotechnologies – A guideline for ellipsometry application to evaluate the thickness of nanoscale films


Status:
Current
Type:
Standard
Language:
English
Price from:
€ 61.03

Scope

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

Number of pages: 26

Published: 2021-03-30

Date of approval: 2021-03-29

International relationships : IEC/TR 63258:2021 IDT

Item number: M349817


Committees

Committee

  • ISO/TC 229
  • ISO/TC 229/JWG 2