Cleanrooms and associated controlled environments – Part 3: Test methods

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Corrected version on 2020-06-03:

This corrected version of ISO 14644-3:2019 incorporates the following corrections:
– cross-references have been corrected in Table A.1, B.4.4, C.1, C.4.2 and C.4.3;
– the wording has been changed in B.2.1 a), Table B.2;
– old Figure B.2 has been removed.

This part of ISO 14644 provides test methods in support of the operation for cleanrooms and clean
zones to meet air cleanliness classifications and related controlled conditions. Tests for classification of
cleanliness are described in ISO 14644-1(classification of air cleanliness by particle concentration and
for macroparticles). Other related attribute levels can be determined using ISO 14644-8 (levels of air
cleanliness by chemicals), ISO 14644-9 (levels of surface cleanliness by particle concentration) and ISO
14644-10 (levels of surface cleanliness by chemical concentration). Performance tests are specified for
two types of cleanrooms and clean zones: those with unidirectional flow and those with nonunidirectional
flow, in three possible occupancy states: as-built, at-rest and operational. The test
methods, recommend test apparatus and test procedures for determining performance parameters are
provided. Where the test method is affected by the type of cleanroom or clean zone, alternative
procedures are suggested. For some of the tests, several different methods and apparatus are
recommended to accommodate different end- use considerations. Alternative methods not included in
this part of ISO 14644 may be used if based on agreement between customer and supplier. Alternative
methods do not necessarily provide equivalent measurements.

Number of pages: 62

Published: 2019-10-22

Date of approval: 2019-10-21

International relationships : ISO 14644-3:2019 IDT

ICS: 13.040.35 - Cleanrooms and associated controlled environments

Item number: M333361



  • ISO/TC 209
  • ISO/TC 209/WG 3

Danish committee