ISO 14644-10:2013

Cleanrooms and associated controlled environments -- Part 10: Classification of surface cleanliness by chemical concentration


Status:
Current
Type:
Standard
Language:
English
Subject:
Price from:
€ 127.42

Scope

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Number of pages: 0

Published: 2013-03-01

International relationships :

ICS: 13.040.35 - Cleanrooms and associated controlled environments

Item number: M236281


Committees

Committee

  • ISO/TC 209

Danish committee

DS/S-438