This standard covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments in terms of airborne concentrations of specific chemical species (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification.
Number of pages: 28
Date of approval: 2006-08-30
Date of withdrawal: 2013-03-08
EN ISO 14644-8:2006 IDTISO 14644-8:2006 IDT