DS/ISO 14644-12:2018

Cleanrooms and associated controlled environments – Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration


Status:
Current
Type:
Standard
Language:
English
Subject:
Price from:
€ 56.89

Scope

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 – For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 – As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 – Health and safety considerations are excluded from this document.

Number of pages: 20

Published: 2018-09-05

Date of approval: 2018-09-03

International relationships : ISO 14644-12:2018 IDT

ICS: 13.040.35 - Cleanrooms and associated controlled environments

Item number: M310547


Committees

Committee

  • ISO/TC 209
  • ISO/TC 209/WG 10

Danish committee

DS/S-438