Standard

DS/IEC/TR 63258:2021

Nanoteknologi – Vejledning om anvendelse af ellipsometri til evaluering af tykkelse af tynde film i nanostørrelse

Status
Gældende Checkmark
Type
Standard
Varenummer
M349817
Udgivelsesdato
2021-03-30
Komite

ISO/TC 229

International arbejdsgruppe WG

ISO/TC 229

Internationale relationer
Tooltip
IEC/TR 63258:2021 IDT
Antal sider
26

Scope

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.