Status
Gældende
Type
Standard
Varenummer
M349817
Udgivelsesdato
2021-03-30
Komite
ISO/TC 229
International arbejdsgruppe WG
ISO/TC 229
Internationale relationer
IEC/TR 63258:2021 IDT
Antal sider
26
Scope
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.